EMS TURBO SPUTTER PDF

The EMS R T is a large chamber, rotary-pumped coating system ideally suited for sputtering a single large diameter specimen up to 8″/ mm (e.g. a wafer). The EMST S Plus is a high resolution sputter coater for oxidizing and non- oxidizing The EMS T Plus product line is a compact turbomolecular- pumped. EMS T Turbo-Pumped Sputter Coater/Carbon Coater. The EMST is a compact turbomolecular- pumped coating system suitable for SEM,. TEM and many.

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For additional targets see Sputtering Targets section. However, this is not suitable for some applications because it can heat the substrate and result in damage when the plasma interacts with the substrate.

Dry pumping alternatives are also available.

Quorum Technologies

Other options are available on request. Unlimited layers of varying thickness from two target materials can be sputtered sequentially by cycling between both targets. Dual channel film thickness monitor FTM. Supplied with a pack of 10 tungsten filaments B and a molybdenum Mo boat. Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last coatings carried out and reminders for when maintenance is due.

Careful evaporation allows precise control of carbon thickness with or without the optional film thickness monitor. The touch screen interface features maintenance prompts that highlight time of last clean, coating time since last cleaned, system ‘on time’ and time of last service.

This allows the user to configure the system as a sputter coater, evaporator or glow discharge system — all in one space saving format. Home Online Catalog of Microscopy Products.

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We promise we will not share your details with any third parties. A wide range guage is available ssputter an option. Cannot be used when the coater is operated in ‘single target’ mode.

Turbo-Pumped Sputter and Carbon Coater

The stage includes two masks for improving uniformity of coating. All are easy-change, drop-in style no screws and are height adjustable except rotary planetary stage:.

The unit has a turbo pump, externally mounted for convenience and easy exchange, and is backed up by a Rotary Vacuum Pump. Manual carbon rod shaper for 3.

Country Please select a country A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

Email Newsletter Be the first to learn about new products for your laboratory and product specials. The EMS T T Plus uses low temperature enhanced-plasma es optimized for the turbomolecular pump pressures, combined with low current and deposition control, which ensures your sample is protected and uniformly coated.

For increased source to sample distance and for coating large specimens.

Coating inserts are interchangeable. System prompts user to confirm turrbo material and it then automatically selects appropriate parameters for that material. For further information see: Automatic vacuum control which can be pre-programmed to suit the process and material, therefore removing the need for manual intervention or control. A rotary planetary style stage with a variable tilt angle from horizontal to 30 degrees.

A large multi-colour status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at turbk distance.

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QT Plus – turbomolecular pumped coater | Quorum Technologies

Also provides rotation drive to the stage. A full range vacuum measurement gauge is included. Aluminum Al rapidly forms an oxide layer which can be difficult to remove. Software detects failure to achieve vacuum in a set period of time and shuts down the process in case of vacuum leak, which ensures pump protection from eme.

Email Newsletter Be the first to learn about new products for your laboratory and product specials.

For convenience a number of typical sputtering and carbon coating profiles are already stored but also allows the user to create their own. Allows multiple users to input and store coating recipes, with a new feature to sort recipes per user according to recent use.

An early Polaron sputter coater. Fitted with three individual sputtering heads and a rotating specimen stag, it was rotary-pumped and suitable for non-oxidising metals. A large multi-color status indicator light provides a visual indication of the state of the equipment, allowing users to easily identify the status of a progress at a distance.

All are easy-change, drop-in style no screws and are height adjustable except for the rotary planetary stage. Careful evaporation allows precise control of carbon thickness with or without the optional film thickness monitor.

Coating inserts are interchangeable. Carbon rod evaporation head insert for 6. NanoSurface Cytostretcher Cell Stretcher.